Used SVG / PERKIN ELMER / ASML Micralign 540 #128869 for sale

SVG / PERKIN ELMER / ASML Micralign 540 is a multi-axis, direct-illumination mask aligner equipment, developed to serve wafer-level and chip-level photolithography applications. SVG Micralign 540 utilizes a mathematical model to determine a user specified alignment of a mask to a wafer. The microscope stage can move up and down in the vertical plane, left and right in the horizontal plane and rotate 360 degrees. All these axes can be easily controlled with the graphical user interface, enabling precise registration of the mask to the wafer. The aligner incorporates both a unique vertical illuminator and a large field of view imaging system. The vertical illuminator uses an adjustable spot of visible light to accurately detect alignment marks on the wafer and helps to ensure precise registration to the mask. The imaging unit combines a motorized imaging objective lens with a color CCD camera, providing continuous and consistent detection of alignment marks and clear imaging of features to ensure an accurate alignment. ASML Micralign 540 utilizes a state-of-the-art, dual-grating autofocus machine for measurement accuracy and repeatability. The dual-grating design allows the microscope to detect both macro- and micro-scale deviations from the focal plane, helping ensure alignment accuracy over the longest possible distances. The dual-grating tool couples with a powerful autofocus controller to enable precise auto calibration of the focus point, further enhancing alignment accuracy. In addition to the above features, the asset also incorporates several engineering features that promote increased precision and repeatability, such as a mechanical shutter for precise exposure control, a 24-bit motorized linear piezo-drive stage, and an optical wedge for reliable wafer placement. Micralign 540 allows users to monitor and record all alignment and focus properties in real time, ensuring reliable and measurable performance. This Mask Aligner model can also be fully integrated into a process workflow equipment, allowing for automated operation and increased process throughput.