Used SVG / PERKIN ELMER / ASML Micralign 650 #128872 for sale
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SVG / PERKIN ELMER / ASML Micralign 650 is a state-of-the-art, advanced mask aligner with precision features and capabilities. It is an X-Y displacement vision contact aligner and stepper used to align photo masks to wafers. It utilizes advanced programmable marks finding algorithm to search through wafers, accurately scanning them to look for patterns and verify the alignment of photo masks. The machine is capable of performing four variable focus power optical alignment using a laser diode in the visible spectrum along with a lower power, background illumination source, and a high-speed camera with image capture capabilities. The system is also equipped with advanced software for wafer contouring, alignment and mask registration control. SVG Micralign 650 comes with an enclosed work area to maintain a clean and sterility during process applications. In addition to providing improved throughput and shortening production time, the machine is also designed to offer superior accuracy of less than one micron for both linear error and radial error. The system has multiple scanning modes that can be utilized to optimize the alignment process. It offers a wide range of magnification levels from x2 to x500, giving users the ability to more accurately analyze and position alignments while maintaining compatibility with standard mask formats. In addition, ASML Micralign 650 has an onboard pre-alignment system to reduce the process of aligning multiple mask layers per wafer from a few minutes down to a few seconds. It also further supports quality control efforts with its closed loop feature, which inspects the mask-to-wafer alignment online and in real time. Its large workstation size also eliminates mistemperature issues, which can be detrimental to the accuracy of an alignment. Altogether, Micralign 650 is an ideal choice for users who require high precision alignment for their photomask fabrication processes. It is highly reliable with its robustness that also comes with flexibility and versatility in working parameters.
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