Used SVG / PERKIN ELMER / ASML Micralign 651HT #156275 for sale

SVG / PERKIN ELMER / ASML Micralign 651HT is a mask aligner designed for fast and precise alignment of photomasks to semiconductor wafers in the semiconductor fabrication process. It is suitable for production environments where high accuracy and throughput are required. SVG Micralign 651HT is a wafer-level stepper with a 4-inch field of view, which provides resolution of up to 1µm pixel size. It features a mask transport mechanism with a large 145mm mask size capability. The equipment is equipped with three optical measurement subsystems, which measure image contrast, macroscopic height profile and microscope focus position. It utilizes a two-axis stage system that can be used for automatic mask placement, providing fast and accurate alignment with a registration accuracy of 0.7µm. An integrated unit controller features an intuitive graphical user interface and easy-to-use programming language. ASML Micralign 651HT is designed to handle a wide variety of applications, including lithography, optical verification, and surface inspection. It can also be used for hot embossing and substrate bonding. The user interface facilitates programming, storing, and retrieving alignment recipes for efficient mask alignment. The machine's optics are housed in an air-bearing module to minimize wear and vibration, resulting in smoother and more accurate wafer alignment. Its high-speed imaging camera delivers fast response times and high-precision data. Its optics also feature an acoustic interference filter to reduce background noise when measuring small details. The tool delivers high throughput with its large mask capacity, variable pattern repeat and easy-to-use programming language. Furthermore, it can be easily integrated with other systems, including opto-mechanical microscopes and automated optical inspection systems. Its highly repeatable alignment accuracy and low-noise operation make it an ideal solution for production environments.