Used SVG / PERKIN ELMER / ASML Micralign #9073862 for sale
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SVG / PERKIN ELMER / ASML Micralign is a mask aligner for microelectronics. It is a precision alignment equipment that is used for accurately placing and aligning semiconductor lithographic masks during the fabrication process of integrated circuits and other types of semiconductor components. It is the core of a wafer fabrication process, as it serves as the backbone of the lithography processes. SVG Micralign consists of a table, stage, optical system and two or more cameras. It enables the positioning and alignment of up to five independent mask layers. A CCD camera is used to detect the imaging points of the individual mask layers, and various methods, such as fiducial markers, are employed for further alignment accuracy. The unit also includes a programmable motor drive stage for automated alignment of the mask layers. ASML Micralign is equipped with advanced optical tools, such as a microscope objective lens, a telecentric lens and a polarizing beam splitter, for precise alignment. The polarizing beam splitter enables simultaneous detection of two masks with different materials or layers. The microscope objective lens is used to amplify the image and the telecentric lens ensures uniform focus throughout the device's field of view. Micralign offers a variety of alignment modes and non-contact alignment features, including automatic pattern recognition, which utilizes CCD images to quickly and accurately zero-in on alignment points. By quickly and accurately aligning the mask layers, PERKIN ELMER Micralign helps to ensure the repeatability and accuracy of critical registration parameters. In addition, SVG / PERKIN ELMER / ASML Micralign offers process and productivity benefits, including a real-time Intelli-Align machine for fast mask alignment and optical feedback for precise alignments. The device also offers a variety of positioning, imaging and alignment functions to make the process more efficient. Overall, SVG Micralign is an essential mask aligner for the microelectronics fabrication process. It offers a variety of alignment tools and features that enable accurate and repeatable mask layer alignment. Its key features, including its advanced imaging tools, real-time Intelli-Align tool, and process and productivity benefits, make it a reliable and invaluable alignment tool.
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