Used USHIO UX-4240 #9364546 for sale
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USHIO UX-4240 is a state-of-the-art mask aligner for semiconductor device fabrication. The equipment is designed to precisely align optical masks and wafers at high speeds. It is equipped with a 4-axis motion stage that allows for fast, accurate pattern alignment. The system also includes auto-focus and alignment camera systems for precise control. USHIO UX 4240 utilizes a variety of light sources for different patterning technologies, including deep-UV, laser-doped, electron-beam and nanoimprint lithography. It features a highly dynamic beam scanning unit capable of controlling velocity, acceleration and direction, allowing for extremely precise patterning. The machine is designed to deliver consistent results for both small and large pattern areas, even with complex design rules. The machine is also equipped with inductively coupled plasma (ICP) sputtering technology for creating thin resist film layers on the wafer. For added productivity, UX-4240 features a four-chamber design that allows for simultaneous mask alignment, metrology and chemistry. This allows for faster throughput and reduced cost per wafer. It also includes a wafer chucking stage for additional pattern alignment accuracy. The tool also includes a laser resist removal asset for removing any existing residue layers. UX 4240 is designed for high uptime, and offers full remote access and maintenance capabilities for improved serviceability. The model includes a digital microscope for easy alignment and inspection of wafers. This allows for consistent device quality with improved yields. The equipment also features advanced safety features and a user friendly graphical interface for enhanced productivity. USHIO UX-4240 is an advanced system specially designed to provide quick and accurate alignment of optical masks and wafers. Its high speed, dynamic beam scanning capabilities, simultaneous mask alignment and metrology, and easy serviceability make it an ideal solution for semiconductor device fabrication.
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