Used ADE / KLA / TENCOR 351 #9390213 for sale
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ID: 9390213
Vintage: 1995
Wafer handling robot
Main body:
MLS
Robot and controller
Stage
Blue line laser
He Ne Laser
Board
KLA 50:
PC
Board
Power
IC:
Power supply
Board
SBC
KLA / TENCOR 95i:
PC
HDD Socket
SMIF:
ARM
Drive controller
1995 vintage.
ADE / KLA / TENCOR 351 is an advanced mask and wafer inspection equipment designed for high speeds and high accuracy. It is capable of detecting defects up to 3nm resolution with 1.5μm minimum feature width. The system employs dual high-resolution optical sensors and a laser confocal microscope, providing high throughput and capable of inspecting up to about one hundred wafers per hour. The unit features two high-speed, high-resolution laser microscopes, providing simultaneous measurement of both topographical and topological features of the semiconductor wafer. The machine is capable of acquiring data at high resolution and speed, enabling it to provide a complete view of each wafer in real-time. This helps in detecting and correcting any defects which would otherwise be missed during manual inspection. What's more, the tool is fully automated with automatic detection, classification, measurement, and analysis capability. Built on ADE ASPECT™ platform, the asset is equipped with On-Wafer-Focus™ technology, which ensures uniform signal acquisition along the wafer surface. The model also offers a wide spectral band, making it suitable for integrated circuit (IC) inspection across different optical frequencies. The interactive user interface of ADE 351 makes it user-friendly and allows it to be easily integrated with both manual and automated defect review processes. Additionally, the equipment is capable of real-time image capture and data analysis. It is also equipped with a variety of settings to adjust contrast sensitivity, image resolution, or color space. The system is both cost-effective and reliable in detecting and locating defects, making it a valuable asset in the semiconductor fabrication industry. Whether it's a faulty wafer or an advanced IC, KLA 351 is up to the task, enabling production of perfect components for a wide range of applications.
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