Used ADE / KLA / TENCOR CR-81 #9102576 for sale

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ID: 9102576
Inspection system.
ADE / KLA / TENCOR CR-81 is an advanced event-driven mask and wafer inspection equipment designed for the semiconductor and integrated circuit fabrication industry. It is capable of measuring and analyzing defects on critical film layers located on both wafers and masks with unparalleled speed and accuracy. The system includes three technologies from three leading names in the industry: ADE (Advanced Defect Evaluation), KLA (TENCOR), and ADE / KLA / TENCOR (TEM Imaging). This combination brings together advanced capabilities for both mask and wafer inspection that go beyond imaging and detect minute defects, foreign particles, and even hidden defects based on the raw image data. ADE CR-81 makes use of specialized scanning electron microscopy (SEM) cameras to generate breathtakingly detailed 3D images of the surface of the wafer or mask. This allows it to detect surface and subsurface defects that are below the resolution of most other inspection systems. The unit performs defect analysis using advanced algorithms, which can automatically identify suspicious shapes and patterns in the 3D image data and flag them for further inspection. At any point of the process, the operator can take manual control and further analyze the flagged defects. KLA CR-81 is integrated with an inspection robot which allows it to autonomously inspect large batches of wafers or masks. This gives the operator increased efficiency compared to manual systems. In addition to the above features, the machine comes with built-in software tools for fault isolation and analysis. This helps engineers understand the source of the defect and quickly implement corrective measures to eliminate them in the future. In conclusion, TENCOR CR-81 is an incredibly powerful and capable mask and wafer inspection tool. Its combination of advanced detection technology and integrated robot allow it to rapidly and accurately detect even micro-scale defects. With its ability to quickly isolate and analyze the source for these defects, CR-81 is an invaluable tool in a wide range of integrated circuit fabrication processes.
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