Used ALLTEQ LFI 3010 #9028586 for sale

ALLTEQ LFI 3010
ID: 9028586
Semi-auto inspection system.
ALLTEQ LFI 3010 Mask & Wafer Inspection Equipment is an automated, high-precision, non-contact, 3-dimensional inspection and metrology platform designed for semiconductor manufacturers or for other industries requiring defect inspection capabilities. It utilizes laser interferometry on a silicon wafer surface to accurately detect, analyze, and measure foreign material, imperfections, and other abnormalities. The system is comprised of a multi-axis stage, laser interferometer, camera, monitors for connecting to a computer, laser source, and automated control software. The stage is designed to rotate around a specimen, allowing the laser beam to trace the wafer's surface profile. The laser interferometer measures the surface profile in three dimensions to an accuracy of 1nm. A monochrome digital camera takes images of reflecting objects and obscurations on the wafer's surface. A laser source illuminates patterns from the mask onto the wafer to detect 3 nanometer defects. The software unit is programmed to identify and detect defects as small as 3 nanometer and deviation in the surface profile. It can detect a wide range of foreign material such as dust, scratches, contamination, and other non-uniformities. The machine can be programmed to scan an entire wafer, detect the defect, characterize it, measure it in 3D, and classify it according to severity. Once the defect is identified, it will be classified according to severity and a 3D image will be generated. LFI 3010 is designed to be user-friendly and easy to operate. It is equipped with a convenient graphical user interface (GUI) which allows the user to monitor the automated vision tool and access its functions. The asset's automated operation allows the user to quickly capture, analyze, and evaluate defects on the wafer. ALLTEQ LFI 3010 is ideal for semiconductor companies or any other industry requiring the detection and analysis of defects and imperfections. It is an invaluable tool for quality control, rapid problem solving, and product development. Its ultra high precision and non-contact 3-dimensional inspection and metrology capabilities make LFI 3010 a cost-effective, efficient solution for the measurement and detection of critical defect and imperfections.
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