Used AMAT / APPLIED MATERIALS Compass 200 #9280961 for sale

AMAT / APPLIED MATERIALS Compass 200 is a comprehensive mask and wafer inspection equipment that provides characterization of advanced structures down to dimensions of 0.25 µm. This system enables high-precision optical inspection with its high-resolution imaging capability, providing superior depth of focus and edge resolution. It is an integrated solution with a range of software tools which allow quick setup and optimized process control for different pattern inspection tasks. It integrates with the industry-standard Allegro mask inspection suite, providing efficient throughput of up to 200 wafers per hour. The unit is designed to perform a number of critical measurements such as overlay alignment and lithography validation. It utilizes advanced CCD and laser-diode technology for wafer options and video-align lasers for mask alignment which ensures smooth and reliable pattern inspection results. The machine also benefits from the high-precision mechanical components and full automation which ensures repeatable results. This ensures that all of the customer's requirements are met. Additionally, AMAT Compass 200 offers Paragon pattern recognition for more complex structures such as contact holes, vias, and lines within the mask pattern. This feature enables built-in rules-based recognition of the individual characteristics of each feature and provides measurement of their sizes and spacings. This reduces the time and effort of the inspection process as well as increases accuracy. The tool also features the 3D imaging module, providing superior depth extraction accuracy and enhanced quality control. This should help to reduce the number of defects or reworks. Furthermore, it is backed by an extensive library of pre-defined CD variations and process nodes for efficient mask review, helping to provide time savings and accurate results. The comprehensive software solution and hardware capabilities of APPLIED MATERIALS Compass 200 mask and wafer inspection asset ensure high-precision results with fast inspection speeds. This is beneficial to their customers as it ensures accurate lithography validation and has improved workflows for process control.