Used AMAT / APPLIED MATERIALS SEM G5 MAX #293647406 for sale
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ID: 293647406
Wafer Size: 12"
Vintage: 2011
Defect review system, 12"
Active damping subsystem
Load lock
G5 Main chamber
PFU Unit / Line conditioner
X-Y Stage and motion controller, 12"
BROOKS AUTOMATION ETU True beam mapper
E-Chuck wafer holder and controller
Factory Interface: SMIF
Missing parts:
PAL Analog board
HVPS
ITU Distribution board
VAC Distribution board
Scintillator blade
PAL Digital board
CCS Board
CVC Board
ITU Controller
ITU Driver
OM Module
DMD Sensor
LFS
OM P.S
IPU
ETU Controller
2011 vintage.
AMAT / APPLIED MATERIALS SEM G5 MAX is a high-precision mask and wafer inspection equipment that offers deep sub-resolution measurement capability and non-destructive analysis of feature sizes. This system is designed to handle the highest accuracy applications, enabling customers to achieve results that meet industry standards. AMAT SEM G5 MAX uses a Scanning Electron Microscope (SEM) to measure features on semiconductor substrates, masks and photomasks with defects that are difficult to detect by other inspection technologies. The state-of-the-art design makes this unit capable of measuring samples as small as 0.01 µm with great accuracy, making it well-suited for customers looking to achieve sub-90nm resolution. It enables defect inspection of mask and wafer surfaces with exceptional accuracy, allowing for early detection and repair of defects that would otherwise be difficult to detect. The machine's electron optics and automated measurements helps to reduce time and decrease cost of low-to-high volume inspection. Its high resolution capabilities provide precise analysis, while its non-destructive analysis makes it ideal for high volume testing applications. The G5 MAX also contains multiple inspection modes, such as variable spot size, variable current and variable stage, allowing for precise and accurate inspection on small features. In addition to its features, APPLIED MATERIALS SEM G5 MAX is equipped with a powerful, user-friendly operating tool. This includes a built-in editor, allowing users to customize and configure the settings for their needs, while also providing quick and easy access to data through its advanced measurement tools. The software also includes support for multiple file formats, enabling customers to store and analyze inspection data with ease. Overall, SEM G5 MAX is an effective and reliable mask and wafer inspection asset designed to meet the most demanding measurements requirements. Its ability to handle large feature sizes with sub-micrometer resolution makes it an excellent choice for those looking for precise and accurate inspections, all while providing a user-friendly and cost-effective model for those with high-volume needs.
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