Used AMAT / APPLIED MATERIALS SemVision CX #9185367 for sale
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ID: 9185367
Wafer Size: 8"-12"
Vintage: 2004
Review station, 8"-12"
E-Beam
Resolution: 4 nm at 1kV
EDX
Automatic defect review and classification capability
Multi perspective imaging
SEM Autofocus
SONY 990 CCD
Optical video image: 2.5x, 20x and 100x
Vacuum chamber
(3) Wafer tilt positions (0, 15 and 45 degrees)
SECS II Compatible
(2) BROOKS AUTOMATION Fixed load ports
SGI (Main computer): IRIX Silicon graphics
EDX: Sun SPARC 5
Operating system: Solaris
MEC, WHC / Image computer: Windows NT
NFS Supports
Missing part: Hard disk drive
2004 vintage.
AMAT / APPLIED MATERIALS SemVision CX is a mask & wafer inspection equipment designed for the most demanding semiconductor environments. It has the highest throughput available on the market, boasting a renowned automated mask & wafer handling, calibration and alignment systems. The system is scalable and upgradeable, capable of meeting the most advanced requirements for wafer and mask inspection. The CX's design incorporates the AdaptiView software platform to ensure that mask patterns and associated structures, like lithography line edge roughness (LER) and critical dimension (CD) measurements, are accurately identified and measured. In addition, the software platform delivers the highest accuracy for wafer and reticle measurements, along with the ability to monitor growth and change on the die surface due to multilayer patterns. The unit's imaging technology employs multiple lens options, from telecentric and aspheric to immersion and 3D, as well as its own proprietary "Light Box" Illumination, with high resolution and multi-color images. It supports a wide range of wafer substrates, including SOI, silicon, glass and others. In terms of its inspection capabilities, the CX features an array of features such as the Yield Management Software (YMS), which allows users to intuitively analyze defects and achieve faster yield improvements. Users can also define process tolerances and customize rules to reduce false calls and classify them in a uniform and efficient manner. Furthermore, the CX offers an intuitive mask inspection report generation machine with statistical analytics, enabling faster fault isolation and analysis. In addition, the tool offers a comprehensive suite of manual (MPD) and automated (CSPD) particle detection and evaluation capabilities. It employs the latest beam scanning technologies for wafer and reticle inspection, along with the most accurate and up to date algorithms for fault detection and correction. To conclude, AMAT SemVision CX Asset is an advanced model designed to meet the most demanding requirements in semiconductor applications. It offers automated mask & wafer handling, calibration, and alignment systems, as well as superior imaging technology and the latest beam scanning technologies. Additionally, it provides advanced software platforms for efficient defect detection, analysis, and fault isolation.
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