Used AMAT / APPLIED MATERIALS SemVision G5 #9132901 for sale
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ID: 9132901
Wafer Size: 12"
Vintage: 2011
Defect review system, 12"
EFF and TB Mapper
Tin Resolution Target
Integrated EDX Spectrometer
EDX Stage Assembly
SW: V5.4.500
4 Colors Programmable Signal Tower
Operator Free Unpatterned Wafer Review
API & Voltage Contrast
G1 Load port
Standard G1 Panel
Moving Omron V640 − Carrier ID Reader
Light Curtain Connection
EVSI USA 208V 60Hz w/T.Ring
Standard EPDU
Bitcon for EQT robot
SemVision - 2x300 Ionizer
EDX Extreme
Leak Valve Option
SECS / GEM / HSMS Compatibility
2011 vintage.
AMAT / APPLIED MATERIALS SemVision G5 is an integrated mask and wafer inspection equipment designed to detect and identify defects in advanced technology photomasks and semiconductor wafers. AMAT SemVision G5 system utilizes an array of advanced 3D imaging technologies, including Deep Flare™, to achieve unparalleled defect detection sensitivity. An integrated fully automated video inspection and metrology engine enables fast, highly automated defect review of wafers and masks. APPLIED MATERIALS SemVision G5 unit is equipped with a high-speed strobe and CCD camera machine. The strobe provides high contrast imaging of photomask features, while the CCD camera detects and captures photosensitive defects on both mask and wafer surfaces. An adjustable aperture illuminates only the chip surface area of interest, while the large field of view allows the detection of surface contamination, including particles. The Deep Flare technology uses multiple image frames captured at different levels and depths to analyze defects within a chip and to determine their size and severity. Deep Flare allows for the inspection of high-density features such as 128nm node patterned media, resulting in increased sensitivity to small-scale defects. The metrology module of SemVision G5 Tool is an integrated framework capable of full-chip analysis of photomasks and wafers. The asset is highly automated and includes specialized analysis software, which enables faster, more accurate defect review. The video inspection engine further increases the accuracy of defect measurements, as well as providing a convenient logged record of inspections. AMAT / APPLIED MATERIALS SemVision G5 is a powerful integrated mask and wafer inspection solution that combines best-in-class defect detection technology with automated metrology. It is suitable for the inspection of photomask and wafer surfaces and can provide superior defect sensitivity, reliability, and accuracy.
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