Used AMAT / APPLIED MATERIALS UVision 3 #293778019 for sale
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ID: 293778019
Wafer Size: 12"
Vintage: 2008
Brightfield inspection system, 12"
2008 vintage.
AMAT / APPLIED MATERIALS UVision 3 is a mask and wafer inspection equipment designed to accurately detect, identify and map defects on advanced wafers and masks. AMAT UVision 3 is a powerful tool in the fab, providing high-resolution imaging and comprehensive analysis of wafer and mask samples to ensure top quality products. The system includes a full suite of imaging and analysis capabilities to identify and quantify all types of contamination, defects, and other features. The unit features a high-performance imaging machine composed of high-resolution optics and illumination systems to acquire the images, and a specialized data acquisition engine to capture the images with high fidelity. In addition, the tool includes specialized imaging algorithms to ensure optimal image quality. APPLIED MATERIALS UVision 3 incorporates a comprehensive set of image analysis and defect rejection capabilities, to map defect locations from complex designs. The analysis capabilities include defect inspection, segmentation, image segmentation, pattern recognition, and pattern matching. The asset also features an AutoAlign feature to improve accuracy and reduce setup times. In addition to defect detection, UVision 3 offers a number of advanced features to improve wafer and mask production yields, including process control for uniformity and yield analysis. The model can detect and monitor lithography hot spots, detect proximity effect variations, and track patterns from wafer to wafer. The equipment can also produce Batch Reports to track wafer and mask performance on a wafer-by-wafer level. AMAT / APPLIED MATERIALS UVision 3 also offers a range of connectivity options to integrate with existing fab systems. The system is configurable to receive data from DTCs, optical tooling, and other inspection systems, and can transfer acquired data to multiple fab systems. The combination of high-quality imaging, comprehensive defect detection and robust process control capabilities make AMAT UVision 3 an essential tool for any mask and wafer fab. The unit offers high reliability and repeatability, and provides critical performance data for improved yields in production.
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