Used AMAT / APPLIED MATERIALS UVision 5 #9298508 for sale

AMAT / APPLIED MATERIALS UVision 5
ID: 9298508
Wafer Size: 12"
Vintage: 2012
Brightfield inspection system, 12" 2012 vintage.
AMAT / APPLIED MATERIALS UVision 5 Mask & Wafer Inspection Equipment is a production-grade metrology system that provides advanced optical inspection and defect review for semiconductor wafers and photomasks used in semiconductor manufacturing processes. AMAT UVision 5 utilizes 360-degree beam scanning technology to precisely measure the dimensional characteristics and surface variations of both complex circuits and photomasks. This unit is capable of both wafer-level and die-level inspection. For wafer-level inspection, the machine utilizes a 1µm beam spot size and a 50μm focusing optical tool with a 195mm maximum vacuum wafer size for magnification up to 10,000x. Additionally, the asset is designed to provide high-precision measurements of both circuits and patterns through its patented continuous focus adjustment to maintain the highest throughput. APPLIED MATERIALS UVision 5 provides high-resolution surface defect analysis, or defect review. This consists of 3D metrology, surface topology profiling, and imaging of both defect features and defect morphology characteristics. The model is equipped with advanced image processing algorithms designed to improve defect review accuracy and repeatability. This includes both Automated Defect Review (ADR) for advanced defect analysis, and automated detection performance metrics for the generation of precise analysis results. UVision 5 equipment automates the entire inspection process, from optical inspection to defect analysis. This includes automated wafer alignment, accurate distortion trace and review, and automatic defect classification. The system also incorporates both 2D mask alignment, and CD/RCD scanning and stitching. Finally, the unit provides routine measurements, performance tests, feature size and OSAT measurements, CD/RCD measurements, and line-edge roughness (LER) measurements to track fabrication yields. By utilizing the integrated automation and high level of data accuracy and precision, AMAT / APPLIED MATERIALS UVision 5 provides reliable and repeatable mask and wafer inspection for production environments. This machine increases throughput, meets lower inspection limits, and offers a higher level of process control.
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