Used AMETEK / TAYLOR HOBSON i-Series PRO #293808007 for sale
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ID: 293808007
Vintage: 2020
Surface and contour measurement system
P/N: M112-105482
Inductive gauge system: 5 mm
Traverse unit, 120 mm
Motorized column, 450 mm (±9° Tilt)
Calibration ball
Stylus tips: 2μm, 60° / 90°
112-102577-01 CNC Y-Axis
Locating stage
112-1859 Self centering chuck
112-4902 Manual 3-Axis stage
Calibration:
Straightness: 0.114 µm
Gauge calibration – Pt: 0.079679 µm
Gauge 3-Line calibration: 0.826 µm
Gauge system noise: Rz 4 nm
Additional stylus:
(2) 112-4577-02
(2) 112-4593-02
(2) 112-4575-02
PC
Workstation
Dual monitor
UPS
Keyboard tray
2020 vintage.
AMETEK / TAYLOR HOBSON i-Series PRO is an advanced mask and wafer inspection equipment designed for high-precision surface metrology and defect detection in semiconductor fabrication processes and other related industries. This cutting-edge instrument integrates state-of-the-art technology and innovative features to provide accurate and reliable measurement data for quality assurance and process control applications. At the heart of AMETEK i-Series PRO is a sophisticated imaging system that utilizes high-resolution cameras and advanced optics to capture detailed images of the surface of masks and wafers. These images are processed using advanced algorithms and analytical tools to extract critical information about the topography, roughness, and defects present on the sample surface. The unit is capable of capturing data at sub-nanometer resolution, allowing for the detection of even the smallest defects and deviations from the desired surface characteristics. One of the key features of TAYLOR HOBSON i-Series PRO is its user-friendly interface, which allows operators to easily set up experiments, capture data, and analyze results with minimal training or expertise. The machine offers a range of pre-configured measurement modes for common surface metrology tasks, as well as the flexibility to customize measurement parameters and analysis algorithms to meet the specific requirements of different applications. I-Series PRO is capable of measuring a wide range of surface parameters, including roughness, waviness, form error, and particle contamination. The tool can perform both 2D and 3D surface metrology measurements, allowing for comprehensive characterization of the sample surface from multiple perspectives. This enables users to gain a thorough understanding of the surface properties and quality of masks and wafers, facilitating process optimization and quality control. In addition to surface metrology, AMETEK / TAYLOR HOBSON i-Series PRO is equipped with advanced defect detection capabilities that enable the identification and classification of defects such as scratches, pits, particles, and pattern deviations. The asset uses machine learning algorithms and pattern recognition techniques to automatically detect and quantify defects on the sample surface, providing valuable insights into the quality and integrity of masks and wafers. AMETEK i-Series PRO is designed to be compatible with a wide range of sample sizes and shapes, allowing for the analysis of masks and wafers of varying dimensions. The model is equipped with motorized stages and precision positioning systems that enable accurate and repeatable measurements across the entire sample surface. This ensures consistent and reliable results, even when analyzing samples with complex geometries or non-uniform surfaces. Overall, TAYLOR HOBSON i-Series PRO represents a state-of-the-art solution for mask and wafer inspection, providing advanced capabilities for surface metrology and defect detection in semiconductor manufacturing and related industries. With its high-performance imaging equipment, user-friendly interface, and comprehensive measurement capabilities, i-Series PRO is a valuable tool for enhancing quality control, process optimization, and productivity in semiconductor fabrication processes.
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