Used ASM IBE 109 #9396459 for sale

ASM IBE 109 is a mask and wafer inspection equipment designed by ASM International. It is a fully automatic, multi-axis, state-of-the-art system which is able to inspect both mask and wafer films using different types of detectors. The unit is equipped with four top-level detectors: Overflow camera, Front side illumination (FSI), Double-side illumination (DSI), and Contrast Transfer Function (CTF) camera. The Overflow camera is the main detector of the machine and provides an incredibly high-resolution image. It is based on a high-accuracy, high-speed direct line scan. It is able to detect subtle features on the film which other detectors may fail to detect. The FSI detector is used for inspecting heterogeneous films which consist of both transparent and opaque layers. It uses a combination of high-power light and shadow imaging which is able to detect film defects. The DSI detector is used for inspection of homogenous films. It is equipped with two light sources which are able to detect both sides of the film base and layer. It allows the tool to detect both non-periodic and periodic defects in the film base and layer. Finally, the CTF detector is used for measuring the exposure profile of the film. It uses a combination of high power light images and contrast transfer function (CTF) imaging to calculate the profile of the resist layer. IBE 109 also has an integrated software package which is able to control the detector parameters and measurements. The software can be used to control film inspection, defect evaluation, batch processing, as well as data analysis and exporting to other systems. The software is also able to provide real-time feedback on inspecting parameters and can also generate detailed reports for each inspection process. ASM IBE 109 is a powerful mask and wafer inspection asset which offers great precision and accuracy for inspecting heterogeneous and homogenous films. Its software package provides a range of features which improve the overall inspection experience. With its fast, efficient, and reliable performance, IBE 109 is a reliable choice for all mask and wafer inspection needs.