Used ASM ISP-189 #9266308 for sale

ASM ISP-189
Manufacturer
ASM
Model
ISP-189
ID: 9266308
Vintage: 2005
Inspection system 2005 vintage.
ASM ISP-189 is a high-precision mask and wafer inspection equipment designed to enable inspection and analysis of reticles, photomasks, substrates, and wafers with high accuracy. This optical inspection system is capable of inspecting multiple fields of view with an accuracy of up to 0.25 µm, and a repeatability of 0.1 µm provides highly precise analysis results. In addition, its robotics capabilities allow quick and seamless movement from one inspection station to another. ISP-189 incorporates a selection of inspection features that enable accurate evaluation of all types of particle types, critical dimensions, lithography, and long-term flatness issues. Its unique "Sub-Stage Focus Scan" enables capturing of high-parentage images for defect analysis, without additional steps or a separate high-magnification inspection unit. Additionally, the machine is equipped with high-sensitivity die-to-die overlay and alignment measurement for optimized metrology performance. The integrated autofocus feature greatly simplifies wafer and reticle inspection as it renders repeated manual focusing or stage adjustment unnecessary. Moreover, the tool's multiple viewing angles permit high-resolution inspection of defect edges without the need to rotate the wafer or reticle. Additionally, its measurement capabilities include powerful features such as SNR value, angle judgment, circle fitting, ellipse fitting, and up to 7 tilt level ground view inspection. The asset also offers a user-friendly graphical user interface (GUI) that is equipped with a range of advanced features such as 3D inspection applications. The combined 3D and image inspection feature of the model provides deeper inspection results by conclusively pin-pointing and diagnosing potential failure sources. Additionally, a range of specialized software options cater to specific application requirements such as the OCR software which is used for character recognition applications, or the computer-aided design (CAD) software for PCB inspection. The robust and reliable architecture of ASM ISP-189 ensures maximum uptime and ensures optimal performance. It's network support capabilities enable quick and seamless transfer of data to/from local PC for data analysis and storage. In addition, its systematic preventive maintenance feature eliminates the need for regular calibration and other costly maintenance activities. To sum up, ISP-189 is an advanced mask and wafer inspection equipment capable of delivering high-precision metrology results with true-to-life imagery. Its advanced features, high-performance optics, robust architecture, intuitive GUI, and user-friendly design make it an ideal choice for inspection and analysis of masks, reticles, wafers, and substrates.
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