Used ASM LBE 139 #9217594 for sale

ASM LBE 139
Manufacturer
ASM
Model
LBE 139
ID: 9217594
Line buffers 2004-2005 vintage.
ASM LBE 139 is a mask and wafer inspection equipment designed to ensure accurate wafer and mask inspection in the manufacturing process of semiconductor chips. The system employs advanced scanning electron microscopy (SEM) technology providing a large field of view for a wide variety of chip designs. The unit includes alignment and piezo zoom capabilities with a wide working distance offering the best image quality. The column design results in a very low base pressure environment so users can make innovative use of detector packages. A 4K CCD camera is used to detect areas of concern and to precisely identify the chip features. High resolution imaging and a large field-of-view provide detailed imaging of chip features, including any areas of defective chips or masks. The software provides automated pattern recognition and defect detection from a wide range of materials such as those used in wafer fabrication. Using various measurement and image processing tools such as advanced Shading Correction, Brightness Correction, Stitching, and Image Processing, users can inspect defects in a wide variety of applications. The machine can be easily integrated with other static and dynamic metrology tools such as Thermally Assisted Deposition. The tool has a high level of configurability with all components optimized for maximum flexibility for the user. LBE 139 is designed for use in the testing and development of new technologies used in advanced semiconductor chip designs. This asset offers users the most advanced technology in mask and wafer inspection available, providing greater accuracy and improved yield production.
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