Used ASM LBE 139 #9299471 for sale

ASM LBE 139 is an automated mask and wafer inspection equipment designed to detect defects before assembly and manufacturing. The system is an ultra-precise optical inspection machine capable of examining masks and wafers with an accuracy of up to 1µm. Inspection is performed with the help of white light interferometry (WLI). This uses white light to quickly capture high-contrast images and make precise measurements with low noise and high accuracy. The unit is complemented with advanced adaptive optics, providing improved image quality and uniform illumination. The motorized optics on LBE 139 are capable of moving across the mask with a maximum speed of 200mm/s and a resolution of 5µm. The significantly reduces the measurement time process of the inspection, providing a higher throughput. Additionally, the stage has two channels of dynamic focus so that the optics can adapt to various process heights. The software package accompanying this machine, ASM Precision Inspector, is applicable for both ASM LBE 139 instrument and full-field tools. This software provides high-contrast images for improved visual interpretation with powerful filtering and edge detection algorithms. This allows users to measure the smallest feature sizes with greater accuracy. The software also coordinates motorized stages for correct high-speed scanning. Additionally, ongoing maintenance and support are available, which is included in the total purchase of LBE 139 tool. This includes 24/7 technical support with on-site service and remote diagnosis, allowing you to quickly resolve potential issues. Overall, ASM LBE 139 is a dependable and reliable mask and wafer inspection asset that can deliver quality results with improved throughput. It is capable of finding the smallest defects and has a maintenance staff ready to help in times of need.