Used ASM LBE 139H #9266307 for sale

ASM LBE 139H is a mask and wafer inspection equipment used in semiconductor industry. It is equipped with a double focusing objective lens and a high resolution CCD camera that enables accurate image capture of the smallest features in both DUV masks and thin wafers. The system features a software-based image analysis technology that enables the fast and accurate detection of defects with a high degree of accuracy. The unit is capable of detecting patterning errors, scratches, dust, oxide, and contamination as well as other particles or materials on the surfaces of the masks and wafers. It also can detect wiring errors, missing patterns, defects, misalignments, and line width variances. The machine can also accurately detect characteristic values such as mask or wafer pitch, line width, and CD width in order to measure the accuracy of the line width and evaluate the quality of the masks and wafers. It also detects open or short breakages, as well as line width variations. Furthermore, the tool can examine non-dimensional information such as film uniformity, surface roughness, and monitor trends in wafer etch and-drill conditions. The asset features a wide inspection range and a high repeatability, making it an effective tool for ensuring the quality of DUV masks and thin wafers. It is also equipped with an automated measurement and analysis module that facilitates a fast and accurate inspection of large batches of masks or wafers. The model is also capable of controlling the scanning speed of the inspection area and compensating both for dynamic and static deformations to ensure a high accuracy of measurement. It also produces accurate images and data in both production and laboratory conditions. Furthermore, the equipment can detect resist deformations and evaluate both the image and the defects. Finally, the system features an ergonomic user-friendly interface, enabling easy and effective operation. It also includes maintenance support functions such as lubrication, periodic automatic cleaning, and condensation prevention.