Used ASM LBE139CC #9118769 for sale

ASM LBE139CC is a leading-edge mask and wafer inspection equipment designed for the automatic detection and correction of defects in semiconductor device manufacturing. The system uses advanced optical imaging techniques to detect and locate defects in lithography masks and wafers, then provides an array of user-defined editing and correction functions to address the problem at hand. The unit features a large field-of-view optical image capture stage equipped with a unique 5-axis motion control that allows for extremely precise alignment of masks and wafers in the field-of-view. The imaging portion of the machine is followed by an advanced and versatile image analysis and correction software suite that automatically detects and locates all types of mask or wafer defects and allows for specific editing or correction of certain features and shapes. LBE139CC also offers an array of automated mask and wafer inspection functions, such as automated surface topography measurement, automated luminescence inspection, automated critical dimension (CD) measurement, and automated chemical analysis. These functions enable automated inspection of multiple locations in a single mask/wafer and provide detailed feedback on defects in both raw material and processed masks. The tool also allows for comparison of measurement results between different masks and wafers, enabling rapid and reliable coverage of entire manufacturing processes. The asset also offers an array of customizable report options, ensuring that the results of the inspection process can be easily shared with other departments within a semiconductor manufacturing facility. The model also provides a platform for automatic data transfer and data sharing between departments, facilitating seamless integration of the mask and wafer inspection process into the larger manufacturing workflow. Overall, ASM LBE139CC is an impressive and highly versatile mask and wafer inspection equipment which offers an advanced suite of features, enhancing the quality control process within semiconductor manufacturing.