Used ASM LBE140CC #9118771 for sale

ASM LBE140CC is an advanced automated mask and wafer inspection equipment providing high accuracy and high speed critical dimension (CD) measurement. The system offers a broad range of measurement capabilities for a range of mask and wafer sizes, including masks of any size up to 600 mm in dimeter. The advanced software provides comprehensive inspection reports on CD measurements, line width, protective layers, abnormality, and defects. LBE140CC has improved resolution through its optical zoom lenses, giving enhanced precision and accuracy of the measured data. The increased magnifications available range up to 500x for photomask inspection and up to 100,000x for wafer inspection. The unit can also measure 3D images from controlled-depth wafers and masks, helping to detect additional defects. ASM LBE140CC is also equipped with several autofocus functions, such as motion vector autofocus and focus statistic algorithms, which provide precise imaging and a wide depth of view range, even on complicated masks. Predefined 'focus' regions of interest (ROI) can be input and monitored, with real-time defect corrections possible and adjustable focus levels. LBE140CC provides comprehensive analysis and reporting. It features dual resolution and analysis with improved data output. The machine also supports automatic calculations from images, helping to automate match comparisons with a wide range of library images. The equipment can accurately detect and analyze a wide range of features, such as curves, corners, and scratches. ASM LBE140CC offers easy operation and maintenance while still providing high accuracy and reliability. A variety of light sources, such as halogen, red LED, and laser, allow operators to adjust the illumination to suit the needs of different application types. The tool is also designed for ergonomics and is easy to operate, minimizing operator fatigue. In summary, LBE140CC provides advanced mask and wafer inspection capabilities that make it an essential tool for high-precision microfabrication. With its features such as autofocus, dual resolution, focus statistic algorithms, and comprehensive analysis, the asset is an advanced solution for achieving the highest quality mask and wafer inspections, helping to ensure superior production quality.