Used ASM TLB 139 #9299469 for sale

ASM TLB 139 is a powerful, versatile mask and wafer inspection equipment. It is a comprehensive solution for characterization of defects in semiconductor production process flows. The system can quickly identify the anomalies in wafer surfaces and measure the depth of the defects found using a long working distance microscope design. In addition, it can measure the thickness of the masks used for IC production on a wafer level. With a high magnification of up to 2000x, TLB 139 can detect small features on the masks and wafers with great precision and accuracy. The unit is equipped with two imaging cameras: a mask camera and a wafer camera. The mask camera is designed for high resolution imaging of the mask, while the wafer camera captures microscopic images of the defects on wafer surfaces in a large field of view. The machine provides an accurate defect analysis with built-in optical pattern recognition algorithms. It can distinguish between potential defects and false positives by discriminating between the background substrate and the actual features. ASM TLB 139 provides a variety of viewing modes such as polarization, reflected light and transmitted light. Through these various modes, users can observe the mask material and see through the mask to the underlying wafer surface. The viewing modes of the tool can also be used to detect difficult-to-see features on a bright substrate. Automatic focus adjustment can be used for macro or micro focusing on a given area of interest, and manual motorized xy scanning can be used to precisely move the microscopy asset at even smaller steps for more detailed inspection. The model enables intelligent and automated management of the data collected, allowing fast and easy analyses and sharing of results. All data collected is stored in a shared network drive for further review or advanced diagnostics. TLB 139 mask and wafer inspection equipment is also capable of loading and saving macro functions for future reuse or repeating with different settings. This feature makes the system suitable for different types of production lines.