Used BROOKS AUTOMATION BL-200 #9079943 for sale

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ID: 9079943
Wafer inspection system.
BROOKS AUTOMATION BL-200 is a next-generation mask and wafer inspection equipment offering single- and multi-die inspection capabilities. This automated inspection system is ideal for initial setup, design verification, and process reference checks for both the mask and wafer stages of semiconductor fabrication operations. The unit features a highly sensitive 2D inspection principle that uses multi-line laser sensors to detect even the smallest particle or defect. These lasers are mounted on both the front and rear of the device to provide top to bottom coverage. An additional LED light source can be added to the machine to improve the detection of non-optical defects, such as scratches and other fatigued features. The tool is also equipped with a wide range of features to facilitate easy asset setup and operation, including a user-friendly touchscreen interface, an automated model calibration feature, and remote operation capability via a web-based GUI. This GUI allows for easy access to essential equipment information such as inspections results, inputs, and settings. BL-200 system can be mounted in any orientation and on any surface. A range of compatible vacuum and port formats ensures a perfect fit and enables the unit to be moved quickly between different inspection stations. The machine is powered by a powerful image processing engine, which enables it to accurately and quickly inspect multiple dies in a single scan. It can identify a range of defects, including surface contaminants, burrs, and scratches. It can also detect pin flaws and edge aberrations, as well as electronic defects, like shorts and opens. In addition to its core inspection capabilities, BROOKS AUTOMATION BL-200 tool also offers advanced defect analysis, which allows it to pinpoint and classify complex defects; an integrated Optical Scatter Analysis module, which quickly identifies isolated or clustered defects on a particular die; and a Pattern Matching feature, which detects and measures known patterns or lines. With its combination of advanced features and reliable performance, BL-200 mask and wafer inspection asset is perfectly suited to meet the needs of today's semiconductor manufacturers. It provides maximum speed, optimal accuracy, and consistent performance to ensure the highest levels of product quality.
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