Used BROOKS AUTOMATION Zaris #9257397 for sale

BROOKS AUTOMATION Zaris
ID: 9257397
Reticle inspection system.
BROOKS AUTOMATION Zaris is a mask and wafer inspection equipment from BROOKS AUTOMATION. It is a fully automated system that inspects masks and wafers for any defects and contaminants during their manufacturing process. The unit accurately detects and localizes even the smallest defects to provide the visibility and confidence customers need when making mission-critical decisions. The machine is designed to provide high-throughput, high-sensitivity automated inspection. It is capable of inspecting a variety of mask and wafer sizes, with up to four wafer sizes and twelve mask sizes. The tool has two inspection head options: ATR (Automatic Target Recognition) and SEC (Stochastic Edge Comparison). ATR is used for complex defect detection and localizing, while SEC is used for fine grain defect inspection and minimization of false negatives. Zaris features image capture, analysis, and review capabilities. The asset employs specialized inspection algorithms, customized for each product, to accurately inspect for non-visible defects that could affect device performance, yield, and reliability. It also uses advanced imaging algorithms to improve defect detection and reduce false positives. A unique automated machine learning capability helps optimize image capture and measurement window size to ensure accurate measurements on the entire surface of the mask or wafer. The inspection results are presented in a variety of formats for the user to quickly assess the data. BROOKS AUTOMATION Zaris also provides a 3D visualization of surface topography information and detailed defect maps. With its intuitive user controls, setup is quick and easy, and the model enables automated quality control. It also offers high equipment stability and repeatable performance to ensure consistent results. Zaris is a leading mask and wafer inspection system that offers customers the ability to quickly inspect, localize, and characterize complex defects reliably. It is equipped with sophisticated imaging and automated analysis capabilities, which make it ideal for any quality control needs. By providing high-performance, automated inspection, BROOKS AUTOMATION Zaris unit delivers the visibility and confidence customers need when making mission-critical decisions.
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