Used CARL ZEISS AIMS 193 #293795556 for sale
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ID: 293795556
Vintage: 2004
Mask qualification system
Control unit
Reticle size: 6"
Wavelength: 193 nm
Measuring source: Laser
Stage accuracy: ± 2 µm
illumination: 1.5%
CD Dynamic repeatability: 6 nm
CD Static repeatability: 4 nm
Operating system: Windows
2004 vintage.
CARL ZEISS AIMS 193 is a cutting-edge mask and wafer inspection equipment. It is equipped with a high-resolution modular inspection system, making it the ideal solution to ensure the highest quality for the photomasks used in the manufacture of integrated circuits. CARL ZEISS AIMS193 is equipped with an F-Theta-Corrected distortion compensator, which ensures that the imaging beam is accurately focused and aligned to the mask's surface. This ensures that the mask is inspected in its entirety, and that all defects are detected. The beam also has an adjustable spot size, giving the unit flexibility for different imaging requirements. The machine is equipped with high-resolution imaging optics, which can detect defects down to the sub-micron level. The optics are designed for both broad area scanning and line by line aerial imaging. This feature allows for quick and accurate inspection of masks of any size or structure. AIMS 193 also has a high-speed range of exposure settings, allowing for rapid inspection cycles. This makes it an ideal choice for high-volume mask production lines. Finally, the tool is equipped with a state-of-the-art defect detection algorithm, which is capable of identifying even the most minuscule defects. This algorithm will allow engineers to identify possible faults in the mask production process more quickly and accurately than ever before. In summary, AIMS193 is a cutting-edge mask and wafer inspection asset designed for the most demanding applications. It is equipped with high-resolution optics and a powerful defect detection algorithm, allowing it to identify defects down to the sub-micron level. Its high-speed exposure settings make it perfect for high-volume mask production lines, giving engineers the accuracy and flexibility they need to ensure the highest quality photomask production.
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