Used CARL ZEISS / HSEB Axiospect 300 #9397354 for sale

CARL ZEISS / HSEB Axiospect 300
ID: 9397354
Optical review system.
CARL ZEISS / HSEB Axiospect 300 is a sophisticated mask and wafer inspection equipment designed to detect defects in both the production and packing stages of mask and wafer manufacture. This system employs both top-down and bottom-up inspection methods to maximize defect detection, with unmatched accuracy levels, with capabilities up to 300nm of defect resolution. The unique design of HSEB Axiospect 300 adapts seamlessly to both lab-scale and high-volume production runs. It is expertly constructed with an optomechanical load-port and an elevator with misalignment and substrate flatness (+/-2 μm) correction capability. This ground-breaking unit has been proven to be robust even for the most challenging environment, for both 200mm and 300mm wafers. CARL ZEISS Axiospect 300 utilizes high-performance optics. It features a 450 field of view (FOV) lens machine that optimizes the signal to noise ratio, a 5-axis stage for precision metrology and defect detection, and a digital signal processing (DSP) tool that allows for automatic defect classification. Axiospect 300 features a dedicated metrology edition for advanced inspection and repair of mask and wafer panels. It has a "Teach-and-Learn" auto-focus asset which reduces the time required for manual adjustment, and increases the accuracy of the inspection. Its "Live Preview" feature further enhances precision alignments and facilitates quick defect recognition. In addition, the model employs an automatic defect repair tool to remove defined defects in an efficient manner. This equipment can automatically fix nearly any type of defect, thanks to its powerful image analysis algorithm optimized for wafer inspection. Furthermore, CARL ZEISS / HSEB Axiospect 300 inspects the entire semiconductor wafer and is built with advanced software that works in harmony with both ASML and E-beam lithographic systems. HSEB Axiospect 300 gives its users a complete, enhanced imaging solution that facilitates fast and accurate defect detection and repair in both various production and metrology stages of mask and wafer manufacture. With its exceptional feature set, CARL ZEISS Axiospect 300 is the ideal choice for mask and wafer fabrication and production plants all over the world.
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