Used CMS UTR 65 #9250624 for sale

CMS UTR 65 is a robotic mask and wafer inspection equipment designed to provide high resolution in-situ imaging and inspection of mask and wafer substrates. This is accomplished by utilizing a proprietary scanning electron microscope (SEM) platform. The system is equipped with a 9-axis positioning mechanism that allows for precise fine-tuning of focus and tilt as well as the ability to scan through a wide range of masks and wafers. Additionally, the unit is outfitted with a high-resolution camera, enabling the user to analyze and inspect under a wide variety of illumination conditions while providing an uninterrupted view of the sample. UTR 65 integrates a high-performance, automated beam scanning machine, which provides precision positioning of features on the mask substrate. By utilizing the automatic beam scanning and measurement functions, users can quickly analyze and inspect the features on the masks to ensure accuracy. With the integrated camera, users can easily compare expected features to actual features with the possibility of identifying errors before the masks are moved to the next process. To maximize the accuracy and reliability of inspection results, CMS UTR 65 integrates a laser-assisted auto-focus feature. This technologically advanced feature provides automated focusing, allowing the tool to quickly achieve optimum focus as it scans each mask. The laser-assisted focus also ensures that the actual features being measured are accurately focused and presenting the most reliable and repeatable results. UTR 65 is designed for easy operation and use. Not only does the asset provide an intuitive graphical user interface with a customizable display, but it also includes a built-in job queue for automated processing. This optimized workflow allows users to quickly analyze and inspect multiple types of masks from a single job queue. Through the job queue, the model can store all mask information, including fabrication, placement, and part numbers for easy recall. In summary, CMS UTR 65 is an automated mask and wafer inspection equipment capable of delivering high-resolution imaging and reliable inspection results. This system is designed to streamline mask and wafer workflows while providingusers with an easy to use graphical user interface and automated job processing. With the integrated laser-assisted focus, UTR 65 can ensure optimum focus and precision every time, resulting in accurate and repeatable inspection results.