Used CYBEROPTICS Cobra #173485 for sale

ID: 173485
Laser 7 Watt UV and CO2 system.
CYBEROPTICS Cobra is a mask and wafer inspection equipment designed for semiconductor manufacturing applications. It offers a combination of high throughput and precision for detailed metrology, imaging, and film measurements. Using the latest technologies, Cobra is capable of selective area illumination and laser-driven imaging, allowing it to perform high-resolution imaging, film thickness measurements, and die-to-die overlay measurements with high accuracy and reliability. For imaging applications, CYBEROPTICS Cobra is equipped with a 2048×2048 pixel imaging array, with standard 26x optical magnification. The system includes a motorized motion stage, allowing the imaging unit to move in the x-axis, y-axis, and around the wafer. Additionally, Cobra supports a variety of illumination techniques, such as laser-driven imaging, darkfield and brightfield topology image capture. For metrology applications, CYBEROPTICS Cobra is equipped with a high-resolution displacement sensor and a variety of self-calibrating measurement software to accurately measure overlay, line widths, line edge roughness, and critical dimension variations. Additionally, the machine supports bandpass and multi-channel optical filters for colorimetric measurement, as well as advanced Surface Plasmon Resonance (SPR) analysis for additional surface analysis capabilities. For film measurement applications, Cobra is equipped with an optical reflectometer for film thickness measurement. The tool can precisely measure reflection from the wafer surface using a spectrometer which is integrated in the asset. This allows for high throughput measurement of the film type, film thickness, and layer coverage, as well as automated film measurement and flatness/roughness characterization. Overall, CYBEROPTICS Cobra offers a comprehensive and integrated model for mask and wafer inspection and characterization. With high resolution imaging, precision metrology capabilities, and accurate film measurement, the equipment is a valuable addition to any semiconductor manufacturing process. Additionally, the advanced software and motorized motion stage allow for high throughput and efficient wafer inspection, making Cobra an excellent choice for semiconductor manufacturers.
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