Used ECOPIA HMS-5000 #9248771 for sale

ECOPIA HMS-5000
ID: 9248771
Vintage: 2011
Measurement machine 2011 vintage.
ECOPIA HMS-5000 is a next-generation mask & wafer inspection equipment designed to make high accuracy measurements of both masks and wafers for high quality device fabrication. This system features a wide-field binocular vision unit, laser/optical sensors, and the latest multi-sensor inspection technology to perform measurement and inspection tasks to the highest levels of accuracy. The binocular vision machine is composed of two objective lenses with a view field that covers a wide area of the sample substrates. Laser sensors emit light from an 8-axis scanning head, and the reflected light is detected by four light sensors mounted on the structure station. This allows for the detection of any distortions and irregularities that occur on the substrate surface. The laser/optical sensors measure the shape and size of any flaws in the substrate with high accuracy, and the multi-sensor inspection technology further enhances the detection tool by providing a more precise analysis of the physical parameters of the substrates. The advanced optical measurement asset can measure a wide range of samples, including opaque and non-opaque masks and wafers. Not only can it detect surface imperfections, it can also measure the width and thickness of lines, the edge position of patterns, the area and shape of defects, and the surface uniformity of backgrinding wafers. This helps ensure the highest quality device fabrication processes. The automated inspection model also enables users to store and recall inspection data for multiple substrates in a user-friendly graphical user interface (GUI). This is especially useful when analyzing large amounts of samples. Additionally, users can easily compare different sets of inspection data for pattern matching, and they can also set custom parameters for various applications. These features make HMS-5000 a powerful yet versatile inspection equipment. In summary, ECOPIA HMS-5000 is an advanced mask & wafer inspection system that offers users high accuracy measurements for high quality device fabrication. Its multi-sensor inspection technology, wide-field binocular vision unit, and laser/optical sensors make it an ideal machine for detecting surface imperfections in a variety of substrates. Furthermore, its intuitive GUI and customizable features make it a powerful and versatile tool for automated inspection.
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