Used ELICON EMA 3540 #106694 for sale

ELICON EMA 3540
ID: 106694
Vintage: 2003
Review Station, 2003 vintage.
ELICON EMA 3540 is a fully automated Mask and Wafer Inspection equipment for semiconductor device production. This system is designed to provide a fast and accurate detection of defects on IC masks and wafers during production. The unit utilizes advanced optics systems and high-resolution imaging capabilities to successfully detect and display a wide range of defects. EMA 3540 essentially consists of an Optical Substrate Analyzer (OSA) and an Software Evaluation Machine (SES). The OSA heats and flattens the wafer or mask for inspection, covers the substrate with a protective plate, and then directs a low-intensity laser beam of light onto the substrate. As the laser beam is reflected off the substrate, it is monitored by the OMA's advanced optics systems. The OMA are able to detect a variety of defects such as particles, pin-holes, particle clusters, and others that are more difficult to detect with traditional methods. Once the OMA identifies a defect, it is processed and displayed on the SES. This integrated software is designed to assist the user in quickly and accurately interpreting the data. The SES software has the ability to quickly and accurately identify areas of interest on the inspected substrate, classify the defect, and create an inspection report for the user. Additionally, users can make the necessary corrections to the mask or wafer, if needed. ELICON EMA 3540 is also highly customizable and capable of accommodating a wide range of inspection requirements. For example, the OMA can be used to inspect multiple substrates at the same time, while the SES is capable of analyzing and displaying information on large numbers of substrates. Additionally, users can customize the tool to suit their specific inspection requirements, enabling them to quickly and accurately inspect wafers with a high degree of precision and reliability. EMA 3540 is an ideal solution for manufacturers who are looking to optimize their operations and improve the quality of their finished products. Armed with its advanced optics systems, high-resolution imaging capabilities, and customizability options, ELICON EMA 3540 offers fast and accurate mask and wafer inspection capabilities and helps manufacturers reduce their defects and improve their overall process efficiency.
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