Used ESI / MICROVISION 3900 #9255782 for sale
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ESI / MICROVISION 3900 is a mask & wafer inspection equipment designed by ESI for use in the manufacture of microelectronics components, such as integrated circuits (ICs). This advanced lithography system combines scanning electron microscope (SEM) technology and automated pattern recognition to enable inspection of photomasks and resist patterned wafers for both line width (critical dimension, or CD) and pattern integrity. The unit's user-friendly graphical user interface (GUI) facilitates efficient operation and data acquisition. It implements both manual and automated operations, allowing users to configure the inspection mode and parameters for their specific application. Inspection parameters include both the area of wafer to be inspected (such as the active device areas, or ADA) and the circuit elements to be inspected (such as line segments and vias). High-resolution images can be obtained with ESI 3900, allowing for accurate defect detection and measurement. It is equipped with an electron beam current of 0.5 nA to 10 nA and a resolution of 0.2 μm. Additionally, patterns with up to 0.3 μm line width can be identified reliably. It is powered by a Windows XP Professional operating machine for reliable tool control. In addition to basic inspection and measurement functions, the asset also offers the ability to define user-defined inspection rules for more complex patterns. Input data can be acquired directly from an IC layout or CAD drawing, or interfaced with an existing inspection library. Inspection results are reported in an industry standard format, and, if necessary, statistical analysis can be performed on measured data to detect any patterns or trends indicative of process failure. MICROVISION 3900 is designed to provide fast, thorough, accurate and reliable mask & wafer inspection for microelectronics components. Its robust capabilities, high resolution, extended feature set and ease of use make it well suited for a variety of industries that require quality control and in-depth analysis of manufactured parts.
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