Used HERMES MICROVISION / HMI eScan 310 #9281449 for sale

ID: 9281449
E-Beam defect inspection system, 8"-12" FOUP, 12" SMIF, 8" Transfer unit Chamber room Powerbox Power processor Loader.
HERMES MICROVISION / HMI eScan 310 is a mask and wafer inspection equipment designed to provide accurate, high-speed, high-resolution wafer and mask imaging. It is specifically designed for 3D metrology, defect detection, and monitoring of the fabrication of photomasks, reticles, microelectronic discrete components, and MEMS devices. HMI eScan 310 is equipped with advanced microscopy technology with high resolution imaging capabilities and excellent versatility. Its unique optics and intelligent imaging software are designed to make 3D images of high-resolution and with low noise. It can achieve critical resolution up to 5nm, providing a comprehensive view of complex geometries and high-density patterns. The system is also equipped with an advanced beam control and an ultra-realistic image sequence, allowing for full 3D imaging of the surface and its details. Its high-speed data acquisition and accelerated image processing capability allows for easy and accurate image analysis. In addition, HERMES MICROVISION eScan 310 has a wide-field unit, a natively integrated CAD tool, an intuitive 3D viewer, and full automation capabilities to simplify the inspection process. Its dual-camera inspection can be combined with a single-camera machine for full-field inspection, enabling full coverage capture even of the smallest features. The tool also offers advanced algorithms to locate defects in different materials, detect wear levels, luminance uniformity, subpixel resolution variations, and other substrate parameters. It also supports various mask formats including sinc-radial, coplanar, and hexagonal designs. Furthermore, eScan 310 provides an interactive user interface for users to view, compare, analyze, and report results. It also offers multiple datasets which can be compared over time, ensuring accuracy of defect detection. Overall, HERMES MICROVISION / HMI eScan 310 is an advanced mask and wafer inspection asset which can provide high-speed, high-resolution imaging. It is capable of detecting defects in various materials and is equipped with powerful features such as natively integrated CAD tools, automated data acquisition, advanced algorithms, and intuitive 3D viewers. Moreover, the model provides a comprehensive set of features to make the inspection process easier and faster for users.
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