Used HERMES MICROVISION / HMI eScan 320 #9171729 for sale
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ID: 9171729
Wafer Size: 12"
Vintage: 2012
E-Beam defect inspection and review system, 12"
Integrated front-end
Dual pod FOUP, 12"
(2) High quality flat panel displays
GUI / Image computer XEON dual CPU 3.2GHZ, 2GB memory
Host computer Pentium IV 3.2 GHZ, 2GB memory
DBDB (Detection baseon design base) function
E-Chuck wafer holder
Active damping
TFE Electron beam emission source sub-system
Electron optics column sub-system
HV Power sub system
Programmable wafer biasing & charge balance control
SE and BSE high speed detection
2012 vintage.
HERMES MICROVISION / HMI eScan 320 is a fully integrated mask and wafer inspection equipment designed for the efficient detection of defects and other irregularities both on wafers and masks. The system is capable of performing two and five-dimensional imaging, measuring up to 17 microns per pixel and up to 32nm resolution with its improved features. Using advanced imaging technique, HMI eScan 320 is capable of automatically scanning and detecting both minute defects and large-scale variances across a variety of masks and wafers regardless of material or best dimensions. The unit utilizes dynamic imaging techniques to rapidly acquire and accurately compare images to detect any irregularities which may affect chip continuity or quality. Furthermore, HERMES MICROVISION eScan 320 is capable of performing advanced defect analysis on large areas due to its increased speed and coverage. This advanced analysis includes isotropic analysis for various types of defects, such as large line defect, trefoil defects, polygonal defects and pitch defects. It also includes localized defect imaging for tiny diameter holes, gate distance variance, and shorts. EScan 320 operates in low power mode, enabling high speed inspection of large areas while simultaneously reducing the power consumption. This portable, table-top machine is designed to be transported and operated with ease. The tool also comes with a built-in asset supervisor to monitor model performance and maintenance activities. HERMES MICROVISION / HMI eScan 320 is a powerful, cost-efficient mask and wafer inspection equipment that can detect and analyze a variety of defects across a variety of materials. Thanks to its advanced imaging techniques, high accuracy, and low power consumption, HMI eScan 320 is the perfect tool for manufactures looking to optimize their mask and wafer inspection processes.
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