Used HERMES MICROVISION / HMI eScan 320 #9378991 for sale
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ID: 9378991
E-Beam inspection system, 12"
2011 vintage.
HERMES MICROVISION / HMI eScan 320 is a mask & wafer inspection equipment designed to inspect semiconductor wafers and masks for a variety of attributes. The system uses a combination of two different types of microscopes, a white light source, and an imaging camera. HMI eScan 320 utilizes a standard brightfield optical microscope with a variety of available objectives, including air and oil-immersed, allowing the user to inspect areas down to the micron level. For large-scale research and production applications, a five-axis motorized stage permits movement of the target in the x, y, and z axes with sub-micron precision. A variety of magnification settings from 10x to 200x allow for maximum flexibility in inspection capabilities. HERMES MICROVISION eScan 320's digital imaging capabilities are provided by an advanced Zeiss AxioCam ICMS digital camera, capable of capturing images at magnifications up to 1600x. The camera is equipped with a fast 14-bit charge-coupled device (CCD) with a full-frame rate of up to 36 images/sec, providing excellent image clarity and detail. Both color and monochrome verification modes are supported. Additionally, an external color monitor may be connected to the camera to view images in color. The unit also features a high-intensity LED white light source, allowing for consistent lighting across the entire field of view. The LED light source is variable in intensity and provides a wide viewing angle with low thermal variability allowing for optimal images. EScan 320 is an integrated inspection machine offering superior image quality and precision performance. The tool's ability to magnify, record, and image highly-detailed masks and wafers provides an ideal solution for production and research applications that require superior inspection capabilities.
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