Used HERMES MICROVISION / HMI eScan 400 #9311075 for sale

HERMES MICROVISION / HMI eScan 400
ID: 9311075
Vintage: 2011
E-Beam defect inspection system Process: Metro 2011 vintage.
HERMES MICROVISION / HMI eScan 400 is a high-resolution mask and wafer inspection equipment designed for precise and efficient imaging and analysis of patterned masks and wafers. It offers a variety of software and hardware components that provide a comprehensive solution for the detection, diagnosis, and correction of defects and non-conformances on chips and thin substrates. HMI eScan 400 features a high-sensitivity, low-noise CCD imaging system with multiple pixel array which facilitates capturing extremely high resolution images of wafers and masks. The unit also has a robust cross-sectional image acquisition and display capability for identifying small defects or conformances. HERMES MICROVISION eScan 400 has a high-speed, single-axis wafer stage providing a repeatability of up to 0.01 m and a 50 mm field of view. It also supports rapid stage movements and sample exchanges. Aside from the stage, the machine also comes with several software programs designed for various tasks. For image analysis and measurement, the tool offers specialized applications such as a powerful edge detection algorithm, a reliable pattern recognition algorithm, and an effective in-line inspection tool for substrate and component analysis. Moreover, eScan 400 has a highly integrated data handling asset. It uses powerful software programs for data selection, display, and reporting. This integrated model facilitates efficient communication with host systems and other computer-controlled systems. In addition, the equipment can store results to facilitate the performance evaluation and comparison of different wafers or masks. HERMES MICROVISION / HMI eScan 400 system also includes a well-designed user interface with an easy-to-use graphical user interface (GUI) and a wide range of functions for remote configuration, optimization, and monitoring. Additionally, the unit has an intuitive navigation machine for wafer identification. In summary, HMI eScan 400 is a high-performance, cost-effective solution for mask and wafer inspection. It combines a high-sensitivity CCD imaging tool with powerful edge detection and pattern recognition software programs to precisely detect, diagnose, and correct defects and non-conformances on chips and thin substrates. Its integrated data handling and user interface makes it easy to use. This highly efficient and reliable asset is ideal for high-resolution imaging and precision inspection of patterned wafers and masks.
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