Used HERMES MICROVISION / HMI eScan 500 #9316140 for sale
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ID: 9316140
Wafer Size: 12"
Vintage: 2014
E-Beam inspection system, 12"
2014 vintage.
HERMES MICROVISION / HMI eScan 500 is a high resolution mask and wafer inspection equipment that utilizes laser scanning to detect and measure defects on semiconductor materials. HMI eScan 500 features a wide exposure range, large field of view, and high sensitivity, all optimized to detect the smallest defects on the surface of a semiconductor device. HERMES MICROVISION eScan 500 is an advanced system composed of a sophisticated optical micro-imaging setup, a fast scan stage, and an optically stable solid-state image detector. The optical setup consists of a high-resolution telecentric optics with an adjustable numerical aperture and fieldStop aperture. This arrangement ensures that the image is always sharply focused onto the detector regardless of the specimen position. The fast scan stage allows for a wide field of view that covers the entire sample with minimal repositioning and substrate alignment time. The detector is a 32 megapixel back illuminated CMOS sensor that captures large field images with high sensitivity through a variety of optical filters. The acquisition speed of eScan 500 is especially impressive; the unit can scan up to 1 million pixels per second. This allows it to inspect each and every region of a given sample in a reliable and timely manner. HERMES MICROVISION / HMI eScan 500 also offers programmable parameter settings such as brightness, contrast, zoom, focus and scan resolution. This ensures that the most pristine images can be produced for accurate defect sizing and analysis each and every time. In addition to its high performance, HMI eScan 500 is also cost effective. The low cost of the machine ensures that it is an attractive option for smaller chip manufacturers who lack the budget to afford large, expensive systems. Additionally, the tool offers excellent ease of use and requires little to no maintenance. Overall, HERMES MICROVISION eScan 500 is an excellent mask and wafer inspection asset with a cost-effective price tag. With its large field of view, fast scan speed and robust defect detection capability, eScan 500 can reliably detect the smallest defects on semiconductor materials with minimal effort and cost.
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