Used HITACHI LS 5000 #293811582 for sale

HITACHI LS 5000 Mask & Wafer Inspection equipment is a dedicated, high-precision inspection solution, utilizing optical imaging and proprietary mask alignment algorithms. It is designed for inline and off-line mask inspection for a wide range of semiconductor applications and can also be used for 3D mask and wafer inspection. HITACHI LS-5000 employs a versatile five-axis stage, which enables fast compound wafer scanning and superior registration accuracy by combining independent axes. Two camera heads are synchronized to provide an up to 45 degree tilt angle, making it capable of 3-dimensional inspection. The lenses of the two heads can be changed automatically according to the mask size. The system includes the Wafer Defect Review Software, which accumulates, manages and carries out defect analysis. The software operates collaboratively with the mask inspection process, revealing the defects and gathering data. This unit can be used for automated defect review and defect classification. The Predictive Defect Finder (PDF) is equipped with a complex algorithm that recognizes patterns from image data analysis and predicts potential defects. The machine also helps to speed up manual re-inspection with the assistance of a real-time AI-based mask defect review. In addition, it supports fully automated operation via an auto-scanning feature, allowing for an efficient, consistent mask inspection operation. It also offers other features such as air tight inspection tool, and built-in auto-calibration functions. The asset can also be implemented with secondary systems such as CCD metrology. And it's user-friendly interface allows quick and easy setup, resulting in improved productivity. LS 5000 Mask & Wafer Inspection model is a highly reliable and cost effective inspection machine capable of meeting the strictest of requirements. Its high-precision inspection capabilities along with its fully automated operation makes it an ideal solution for high volume production.