Used HITACHI LS 6500 #293643631 for sale

HITACHI LS 6500 is a large-scale automated mask and wafer inspection equipment that can quickly and accurately detect product defects across multiple substrates. The system leverages advanced algorithms to detect and classify defects, while also allowing users to customize their scan plans to better analyze specific inspection areas. The unit is designed to provide high inspection accuracy and detection rate, while remaining extremely flexible and customizable to meet the needs of the user. The machine consists of an optical sensing tool, an active substrate mechanism and various wafer and mask inspection stages. The optical sensing asset can detect various defect types across substrates and features advanced imaging techniques to improve accuracy and speed. The active substrate mechanism is responsible for carrying substrates from cassette to cassette and transferring them between wafer and mask inspection stages. The wafer inspection stages feature two different broadband optical systems. The first model is responsible for inspecting overall topography and surface texture. The second equipment is used for die-level analysis and includes advanced defect signal discrimination and analysis. Lastly, the mask inspection stages can detect various forms of mask defects, including partially filled pattern features, missing features, voids, misalignments and areas with device-level defects. The user interface of HITACHI LS-6500 contains an extensive range of options and allows various functions to be tailored to suit the specific customer needs. It helps users design scanning plans and quickly detect emerging defects. The system also offers a high degree of automation, as it can quickly configure scan plans and adjust equipment settings according to customer specifications. In conclusion, LS 6500 is a highly advanced, automated mask and wafer inspection unit that provides users with a reliable, high accuracy method of inspecting wafers and masks. The machine is designed to offer fast, precise detection rate while allowing users to customize the tool to suit their specific needs. The asset is easy to use and helps automate parts of the process to save users time and improve accuracy.