Used KLA / ICOS CI 9450 Rev. 5 #9016183 for sale

KLA CI 9450 Rev. 5 is a mask and wafer inspection equipment designed to detect surface defects and defects in the alignment and control of polycrystalline materials. It is suitable for detection of semiconductor surface processes and can detect isolated non-periodic flaws as small as 5 nm up to large irregular defects. The CI 9450 features a sophisticated, high-resolution optical system with patented Quad-Pixel™ technology for superior signal-to-noise performance. This helps deliver improved signal-to-background contrast and increased capability for high-resolution defect detection. The unit is equipped with objectives that range from long working distance (LWD) to high numerical aperture (NA). This enables high-mag inspection of even the most challenging process conditions. The machine is powered by a Windows-based software suite for operation and management of data. Included are an intuitive user interface, powerful image analysis algorithms, and automation features. Image analysis is facilitated through a variety of basic and advanced capabilities, including defect detection, classification, review, reporting, and sorting. A comprehensive suite of wafer stand-alone statistical process control (SPC) tools is available for efficient data analysis and failsafe operation. The CI 9450 also features a sophisticated five-axis stage for robotic one-pass inspection that is capable of high-speed operation with reduced vibration. Smart yield mapping technology ensures the highest uptime by automatically optimizing the field of view and coverage ratio. The tool also offers dual-axis stage motion control and crossed-axis drift compensation for increased accuracy. Overall, ICOS CI 9450 Rev. 5 is a high-performance mask and wafer inspection asset that is capable of detecting extremely small defects. It offers sophisticated optical and image processing features, a powerful Windows-based software suite, and five-axis stage for robotic one-pass inspection. These features combine to make the CI 9450 an ideal solution for both research and production applications.