Used KLA / ICOS CI 9450 #9159845 for sale
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KLA / ICOS CI 9450 is an automated optical inspection equipment for wafer and mask inspection. It is equipped with advanced optics, electronics and software control platforms that allow users to accurately measure features down to the sub-micron level. KLA CI 9450 is designed to perform a wide range of automated optical inspection tasks such as detecting geometry defects, wafer surface defects, over-etched features, and measuring line widths. It can be used in both fabrication and wafer testing environments. The system is composed of several components, including an objective turret, magnifiers, light source, cameras, and image processing software. The objective turret is capable of a 10x to 250x magnification range and can support over 11 objectives. It operates at a maximum speed of 2.5 rotations per second and is highly accurate, allowing for precise measurement and analysis of even the smallest features. The light source is fitted with LEDs that can provide a range of wavelengths from 400 nano-meter (nm) to 900 nm, allowing users to detect various defects including metal contaminants, photoresist chipping, particles, and other wafer and mask surface defects. The cameras utilize a 4 megapixels CMOS (Complementary Metal Oxide Semiconductor) imaging unit to capture images with a 5.4 μm pixel size at a maximum resolution of 3,000 dpi (dots per inch). Also, using multiple cameras with a FOV (Field of View) of 3mm each, the machine is able to view an entire wafer in one shot. The inspected images are then processed by proprietary imaging and reconstruction software. This software allows the tool to detect any defects and quantify them for further analysis. It provides the user with a variety of visual aids, such as zoom, contour lines or imaging, as well as other parameters like contrast, brightness, superresolution, polarity, orientation and other settings. In summary, ICOS CI-9450 is an automated, high-precision, and high-speed inspection asset. It is designed to provide accurate measurements with excellent image quality. Its powerful optics, imaging, and software support provide a robust and reliable inspection platform that is suitable for both fabrication and inspection purposes.
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