Used KLA / ICOS CI-T120 #9246691 for sale
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KLA / ICOS CI-T120 is a sophisticated mask & wafer inspection equipment designed for lithography process control. It provides critical metrological data to enable improved part yield, quality, and cost control. KLA CI T120 is a state-of-the-art automated mask and wafer inspection tool capable of analyzing mask data, reticles, individual fields, and full wafer-level patterns on a variety of process layers. This comprehensive system takes into account the variety of substrates used in fabs, including 1x and 2x reticles, produced with a range of resolutions from 0.25 to 0.45 μm. Using proprietary advanced algorithms, ICOS CI T-120 allows users to compare defectivity, defects, designed elements and their size, pitch, optical density, geometrical parameters, source types, and other related parameters, for traditional optical-level inspections. In addition to its fast and accurate optical inspection capabilities, KLA CI-T120 also offers a range of advanced capabilities, such as overlapping, edge placement, solder mask, and registration, in addition to critical process checks. This unit also enables users to quickly identify and identify problems within a process that can be improved with calibration. KLA / ICOS CI T-120 is also highly tolerant of process variations and substrate differences, meaning it can identify process variations at very low concentrations, as low as 0.001%. This machine is also capable of detecting defects as small as 0.1 micron, and provides a wide range of reporting capabilities. CI T120 is the ideal tool for those looking for a cost-effective and reliable mask and wafer inspection asset. Its tight process control allows users to ensure yields remain consistent, its robust design offers a low cost of ownership, and its flexible inspection capabilities offer a significant return on investment.
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