Used KLA / ICOS CI-T130 #293828078 for sale

KLA / ICOS CI-T130 is an automated mask and wafer inspection equipment based on brightfield imaging. The system has a 390 mm x 520 mm field of view, which is ideal for inspecting large areas of photomasks and wafers. KLA CI-T130 is equipped with a high resolution CCD camera and LED light sources while employing advanced image processing and customer-specific algorithms. Thesystem is capable of detecting and visualizing defects on the surface of a photomask and wafer with accuracy of 2-3 um, in a fully automated fashion. The unit's software enables precise 3D measurement of defects with a signal to noise ratio of 4:1. Its user-friendly 3D graphical user interface (GUI) allows for customization of the inspection parameters such as detection threshold and automatic image analysis. Users can also assign different camera settings, such as gain, to different areas of the wafer for optimized results. For wafers, the machine can detect missing and wrong polarity defects via a metal defect inspection as well as missing or extra via a poly defect inspection. Additionally, it can detect contact opens and shorts, broken lithographic lines, and bridge fillets. The tool's scratch/print color measurement can differentiate between mineral and organic contaminants as well as measure dirt and ambient contaminants. Other features include light field, IR inspection, feature fracturing, coating, surface stress, and contaminant coverage measurements. ICOS CI-T130 offers a cleanliness inspection capability which is designed to detect fallout particles, scratches, and other impurities that have escaped traditional in-line cleaning processes. The asset not only provides absolute tight tolerance footprint and line width measurements, but also provides a complete sub-micron topography of the critical feature areas. The material classification is also possible with CI-T130. The model's smooth and reliable operations make it ideal for mask and wafer inspection, ensuring optimal results no matter what the size or complexity of the job. Its intuitive user interface makes it suitable for both novice and experienced technicians, while its advanced features make quality assurance easier and more efficient. With KLA / ICOS CI-T130, KLA has created a powerful mask and wafer inspection equipment that is both accurate and easy to use.