Used KLA / TENCOR 201 #293647441 for sale

ID: 293647441
Mask inspection system (4) Poles Power supply: 208 V, Single phase.
KLA / TENCOR 201 'mask & wafer inspection' equipment is a highly sophisticated industrial system that helps in the inspection of patterns on masks and wafers. The unit is equipped with an array of features for checking the fidelity of the pattern and its structural integrity. KLA 201 machine uses a three-mirror imaging subsystem that enables high-quality imaging at all levels of inspection, providing it the required accuracy. The highly advanced optics tool gathers both brightfield and dark-field image information which is then collected and stored. The extracted data is then translated into a set of images and maps to reveal a detailed statistical analysis of the investigated structure surface and its sidewalls. Moreover, the in-built patented Measurement Commander software can make both high-precision wide-field metrology measurements and inspection measurements automatically, capturing two levels of metrology data. The first level comprises surface layer thickness, flatness and overlapped pattern or line density; while the second one working on the edge of the mask pattern involves sidewall thickness, line shape and cross-sectional area. The inspection capabilities of TENCOR 201 asset are further enhanced by the Variable Job Setup that allows for shortening of the learning curve. This employs existing data libraries for various test tasks like overlay, width and metal- line defects, making the inspection run faster and with higher accuracy. 201 has one of the most advanced environment-controlled inspection systems that allow for enhanced image quality by mitigating vibrations and other environmental effects. Additionally, KLA / TENCOR 201 functioning is reliable in hostes of conditions, even in high temperatures and extreme humidity. This endows it with immense accuracy and confidence in results, essential for manufacturing processes. Overall, KLA 201 model is an innovative and efficient way of inspecting masks and wafer patterns for manufacturing purposes. The equipment is loaded with features that make it the go-to industrial system for mask and wafer inspections.
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