Used KLA / TENCOR 2111 #9082266 for sale

ID: 9082266
Defect review system.
KLA / TENCOR 2111 is a leading-edge mask and wafer inspection equipment from KLA Corporation that uses projection optics to detect defects on highly dense integrated circuits. The system employs advanced computational techniques to deliver unparalleled accuracy in detecting defects on both the mask and wafer layer. The unit utilizes a 180W ultra-short pulse laser deployed with a patented ProScanIA™ micro-optics head to acquire high-resolution 2D overlays of the wafer and mask surfaces. Its 5X projection optics creates a highly accurate top-down image of the wafer and mask surfaces, revealing defects with a very high degree of precision. KLA 2111 also features a high-speed image acquisition machine, which captures both masked and unmasked images and performs a host of image processing algorithms. These algorithms enable the detection and classification of patterned defects in a single inspection cycle, a feature that drastically reduces inspection time and increases yield. The tool includes proprietary software to help customers verify and assess their defect inspection results. The software supports a range of quantitative metrics to enable users to characterize their device structures. For ease of use, TENCOR 2111 also features an advanced graphical user interface (GUI). This GUI allows users to quickly generate customized reports with high-level summaries, without sacrificing in-depth data analysis. 2111's combination of high resolution optics, advanced image processing capabilities, and intuitive GUI creates an unbeatable mask and wafer inspection asset. This model provides incredibly detailed 2D analysis, ideal for identifying and quantifying both masked and unmasked defects. It is the perfect tool for semiconductor manufacturers and engineers seeking to maximize yield and identify critical issues early in the product design life cycle.
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