Used KLA / TENCOR 2111 #9410123 for sale

ID: 9410123
Vintage: 1995
Defect review system 1995 vintage.
KLA / TENCOR 2111 is a mask and wafer inspection equipment for measuring and monitoring the surface quality of a variety of substrates. The system is capable of high-resolution, fast and accurate testing, providing results at the nanometer level. It is the perfect tool for a production environment, providing improved yields and lower costs. KLA 2111 uses a dual-column design for true image stitching, combined with a linear motor and encoder unit that enables cycle times of under 5s. Currently, the highest resolution available on the machine is 3.1nm. The tool also features an expandable 30-position automation component that can be upgraded with additional frames after installation. The asset features an array of different inspection technologies to ensure the most accurate results. These include optical and electrical, defect inspection and mapping, aerial imaging and SEM (scanning electron microscopy). Defects are identified and isolated based on size, position and image contrast. The model also provides an advanced data correction and mask correction equipment, plus a 3D visual feature analysis software that provides high-precision analysis for wafer and die surfaces. TENCOR 2111 has a highly advanced user interface that allows for complete control over the entire system. Parameters such as data acquisition speed, x-ray source, test limits and more can all be customized to the user's needs. The unit also provides a built-in autofocus that is designed to achieve quick focus and accurate results every time. 2111 is designed to be easily serviced, with a modular design that allows for easy access to replacement parts. The machine also includes an audit log that provides an account of all adjustments made to the tool. Overall, KLA / TENCOR 2111 is a state of the art mask and wafer inspection asset. It is an exceptional model for all production environments, providing improved yields and lower costs. The equipment offers a high level of accuracy and reliability, along with quick and easy maintenance for sustained operation.
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