Used KLA / TENCOR 2131 #195227 for sale
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ID: 195227
Wafer Size: 8"
Vintage: 1995
Wafer inspection system, 8"
UI System
KLA-2252 System
Monitor
Keyboard
Mouse
Printer
Power and signal cable
Robot
X and Y Chuck stage
PC
Power supply: 120 V, 25 A, 50/60 Hz, Single phase
1995 vintage.
KLA / TENCOR 2131 is a next-generation mask and wafer inspection equipment designed for production testing of semiconductor wafers and masks. Combining leading-edge hardware with advanced software, it allows for quick and accurate detection and characterization of defects during the wafer fabrication process. The system is capable of operating at very high speeds, with a maximum resolution of 50 nanometers across the entire field of view. It includes a master subsystem featuring a color CCD camera, a high-precision stage, and high-intensity illumination. This is complimented by a unique multifunctional high-resolution imaging unit covering two full layers of the wafer. Additionally, the machine utilizes a variety of analytical tools, such as E-beam metrology, to maximize the accuracy and reliability of the inspection process. The tool's intuitive software enables operators to quickly and effectively set the analysis parameters and initiate the test. Its user-friendly inspection menu offers operators a range of options, including infrared imaging, spectral imaging, visualization and metrics, and defect detection. Furthermore, the asset's real-time data analysis permits operators to easily view and assess the results of each inspection. In addition, KLA 2131 features automatic classification of defects according to industry standards. This enables predictable inspection results, and can help reduce cycle time during device fabrication. It is also compliant with industry safety guidelines and emissions standards. TENCOR 2131 is ideal for a wide range of applications, from wafer fabrication to wafer thinning and mask imaging. Its advanced features and intuitive software make it an invaluable tool for semiconductor fabrication and processing.
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