Used KLA / TENCOR 2132 #135009 for sale
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KLA / TENCOR 2132 is a Mask & Wafer Inspection Equipment designed to improve semiconductor yield, quality, and reliability. It combines advanced optics, sophisticated software, and Lightning Wafer Inspection technology to inspect for defects with micron-level accuracy. The system is equipped with a high-resolution CCD camera and telecentric optics to capture images of the mask or wafer with a field-of-view of up to 8mm x 8mm. The telecentric optics corrects the geometric distortion caused by an angled view, which allows for higher image quality and detection accuracy. The unit also features an Infinity Focus Beam Profiler, which creates an imaging plane at the focal point of the optics, creating a 3D laser profile map of the inspected surface. KLA 2132 features a control machine with a user-friendly graphical interface and auto-detection algorithms. The tool enables single-click setup and rapid processing of scanned surfaces. It also incorporates an auto-calibration feature, which optimizes imaging parameters to maintain high levels of positioning accuracy. In addition, the asset is equipped with a range of Quality Analysis Modules, intelligent techniques that analyze complex defects and generate detailed defect measurements and analysis reports. This includes die-to-die comparison, color mapping and ring analysis for defect detection and classification. TENCOR 2132 autocollimators, an array of mirrors and lenses, allow for aberration correction, eliminating the need for manual optical alignment. The model also incorporates an on-stepper integration option, which enables high-resolution inspection of a wafer in real-time during stepper exposure, allowing for fast and accurate defect monitoring. 2132 gives semiconductor manufacturers the capability to inspect at the micro-scale to identify and mitigate yield loss and production defects. As well as providing clear, detailed images, the equipment offers advanced automated defect detection and classification, enabling manufacturers to improve both the quality and reliability of their products.
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