Used KLA / TENCOR 2132 #9383459 for sale

KLA / TENCOR 2132
ID: 9383459
Wafer Size: 6"-8"
Vintage: 1995
Wafer inspection system, 6"-8" Main body 1995 vintage.
KLA / TENCOR 2132 is a mask and wafer inspection equipment that helps manufacturers ensure the quality of their semiconductor devices. It is used to detect and characterize defects in photomasks, engineering drawings, and other newly manufactured metal and dielectric layers. KLA 2132 system consists of two major components - the Wafer Inspection Unit (WIS) and the Mask Inspection Machine (MIS). The WIS component performs optical inspection on unpackaged wafers and gathers essential process and defect data for electrical testing and die analysis. It also verifies wafer parameters, including uniformity, geometrical placement, and across the wafer critical dimensions. The MIS component provides die-to-die inspection of a photomask blank designed to detect critical defects such as peeling or contamination and compare them to the intended design layout. TENCOR 2132 tool employs a variety of advanced technologies including high-resolution digital imaging, off-axis illumination, automatic phase-shifting, and specialized optical components for improved image acquisition. Its imaging capability allows for geometrical measurements and defect characterization down to the nanometer scale, which is helpful in identifying issues early in the fabrication process. The asset also includes several built-in quality assurance features such as an automatic target selection and evaluation process. This helps reduce inspection time and ensure that the most critical defects are identified before mass production. The model supports a transparent defect classification method and is designed to enable easier integration with database systems. This makes it suitable for integration with other metrology solutions, facilitating automated defect tracking and characterization. Additionally, the equipment provides fast data storage, enabling manufacturers to track and compare changes over time. Overall, 2132 is an automated, high-precision wafer and mask inspection system that helps manufacturers produce quality devices. It offers users a reliable and efficient platform for unit integration, defect detection, and manufacturing analytics.
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