Used KLA / TENCOR 2132 #9389837 for sale

KLA / TENCOR 2132 is a mask and wafer inspection equipment designed for both process control and yield management. It is a fully automated, advanced imaging system that can detect and measure defects in a range of mask, wafer and photomask sizes. The unit relies on a high throughput optical design, precise scanning and automatic autofocus capabilities to get clear and uniform images at an average throughput of 1-2 samples per second. The hardware includes multi-spectral LED illumination and a camera with a global shutter CMOS sensor. The machine optics pairs high-resolution imaging with large-area sensing, enabling fast sampling and detection of potential defects. Motion control and precise sensors ensure that sample movement is optimized during the whole inspection cycle, resulting in consistent and accurate image capture. The tool also features precise image analysis with TrueSpectrum feature-based algorithms. Specially designed algorithms allow precise defect detection with minimal false alarms, enabling speed and accuracy. The algorithms can measure feature dimensions and geometric characteristics, and include enable real-time defect sizing and classification. KLA 2132 is designed with a user-friendly interface, allowing easy set up and changeover, as well as easy data collection, analysis, and reporting. This asset also offers intuitive reporting capabilities, allowing the user to generate a variety of formats for different reports. Post processing image analysis and defect sizing are fully automated for on-the-fly adjustments. TENCOR 2132 is more than just a mask and wafer inspection model. It can also be used for a range of production and engineering applications including: quality control of LCD and OEL items, semiconductor manufacturing processes, quality assurance of lithography exposures, review of photomask and reticle patterns, and defect detection in CCDs. With the optional "systems integration" interface, the equipment can integrate with users' existing production or engineering systems - providing better control of process flows, improved component handling and optimized yields.